Resistivity Reference wafer of single crystal silicon material is made by using High purity polysilicon,throught the single crystal equipment,and then using many manufacturing process such as doping by the way neutron evolution.Having the standards which has certain hysical geometry size. Using Standard device which the uncertainty is known to Calibrate the resistivity value and other parameters of Resistivity Reference wafer.
The Specification Requests of Resistivity Reference wafer.
The size and the surface quality of Resistivity Reference wafer.